Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films Journal

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Numerical ellipsometry: Advanced methods for design, testing, and use of artificial intelligence for absorbing films using Jones and/or Mueller measurements. 43. 2025
Numerical ellipsometry: AI for real-time, in situ process control for absorbing films growing on unknown transparent substrates. 42. 2024
Numerical ellipsometry: Artificial intelligence for rapid analysis of indium tin oxide films on silicon. 42. 2024
Numerical ellipsometry: Artificial intelligence for real-time, in situ absorbing film process control. 42. 2024
Numerical ellipsometry: A method for selecting a single β-gallium oxide monoclinic crystal orientation able to determine the complete permittivity tensor. 41. 2023
Numerical ellipsometry: A method for selecting a near-minimal infrared measurement set for β-gallium oxide. 39. 2021
Vapor phase infiltration of aluminum oxide into benzocyclobutene-based polymer dielectrics to increase adhesion strength to thin film metal interconnects. 38. 2020
Numerical ellipsometry: Methods for selecting measurements and techniques for advanced analysis applied to β-gallium oxide. 38. 2020
Numerical ellipsometry: n-k plane analysis of transparent conducting films. 29. 2011
Electron beam dissociation of CO and CO2 on ZnS thin films. 17:692-697. 1999
Numerical ellipsometry: Applications of a new algorithm for real-time, in situ film growth monitoring. 14:2331-2336. 1996
IN-SITU DEPOSITION OF YBA2CU3O7-X SUPERCONDUCTING THIN-FILM WITHOUT HIGH-PRESSURE OXYGEN DURING FILM-COOLING. 12:533-535. 1994
STUDY OF THE IONIZED CLUSTER BEAM TECHNIQUE. 9:537-541. 1991
Numerical ellipsometry: Real-time solutions using mapping onto the complex index plane. 14:786-790.
Optical properties of cobalt oxide films deposited by spray pyrolysis. 14:685-692.
STUDY OF THE IONIZED CLUSTER BEAM TECHNIQUE. 8:1453-1457.
Numerical ellipsometry: Analysis of thin metal layers using n-k-d twisted curve methods with multiple incidence angles 2010
Modeling of large cluster synthesis 1999
Nanophase copper thin films deposited from a beam source 1999
Analysis of surface void fraction using atomic force microscopy 1996
EFFECTS OF SPACE-CHARGE ON ION ENERGY IN IONIZED CLUSTER BEAM FILM DEPOSITION 1992
DEVELOPMENT OF ARTIFICIAL NEURAL NETWORKS FOR IN-SITU ELLIPSOMETRY OF FILMS GROWING ON UNKNOWN SUBSTRATES
Determining the optical properties of a mixed-metal oxide film, Co3-x-yCrxFeyO4, with spectroscopic ellipsometry and atomic force microscopy
VIRTUAL INTERFACE METHOD FOR IN-SITU ELLIPSOMETRY OF FILMS GROWN ON UNKNOWN SUBSTRATES

International Standard Serial Number (ISSN)

0734-2101

Electronic International Standard Serial Number (EISSN)

1520-8559