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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
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Overview
publication venue for
Numerical ellipsometry: AI for real-time,
in situ
process control for absorbing films growing on unknown transparent substrates
. 42.
2024
Numerical ellipsometry: Artificial intelligence for rapid analysis of indium tin oxide films on silicon
. 42.
2024
Numerical ellipsometry: Artificial intelligence for real-time,
in situ
absorbing film process control
. 42.
2024
Numerical ellipsometry: A method for selecting a single beta-gallium oxide monoclinic crystal orientation able to determine the complete permittivity tensor
. 41.
2023
Numerical ellipsometry: A method for selecting a near-minimal infrared measurement set for β-gallium oxide
. 39.
2021
Vapor phase infiltration of aluminum oxide into benzocyclobutene-based polymer dielectrics to increase adhesion strength to thin film metal interconnects
. 38.
2020
Numerical ellipsometry: Methods for selecting measurements and techniques for advanced analysis applied to β-gallium oxide
. 38.
2020
Numerical ellipsometry:
n-k
plane analysis of transparent conducting films
. 29.
2011
Growth of high-quality SrTiO
3
films using a hybrid molecular beam epitaxy approach
. 27:461-464.
2009
Electron beam dissociation of CO and CO2 on ZnS thin films
. 17:692-697.
1999
Numerical ellipsometry: Applications of a new algorithm for real-time, in situ film growth monitoring
. 14:2331-2336.
1996
Numerical ellipsometry: Real-time solutions using mapping onto the complex index plane
. 14:786-790.
1996
IN-SITU DEPOSITION OF YBA2CU3O7-X SUPERCONDUCTING THIN-FILM WITHOUT HIGH-PRESSURE OXYGEN DURING FILM-COOLING
. 12:533-535.
1994
STUDY OF THE IONIZED CLUSTER BEAM TECHNIQUE
. 9:537-541.
1991
Optical properties of cobalt oxide films deposited by spray pyrolysis
. 14:685-692.
STUDY OF THE IONIZED CLUSTER BEAM TECHNIQUE
. 8:1453-1457.
Numerical ellipsometry: Analysis of thin metal layers using n-k-d twisted curve methods with multiple incidence angles
2010
Modeling of large cluster synthesis
1999
Nanophase copper thin films deposited from a beam source
1999
Determining the optical properties of a mixed-metal oxide film, Co3-x-yCrxFeyO4, with spectroscopic ellipsometry and atomic force microscopy
1997
Analysis of surface void fraction using atomic force microscopy
1996
DEVELOPMENT OF ARTIFICIAL NEURAL NETWORKS FOR IN-SITU ELLIPSOMETRY OF FILMS GROWING ON UNKNOWN SUBSTRATES
1994
EFFECTS OF SPACE-CHARGE ON ION ENERGY IN IONIZED CLUSTER BEAM FILM DEPOSITION
1992
VIRTUAL INTERFACE METHOD FOR IN-SITU ELLIPSOMETRY OF FILMS GROWN ON UNKNOWN SUBSTRATES
Research
category
MATERIALS SCIENCE, COATINGS & FILMS
Category
PHYSICS, APPLIED
Category
Identifiers
International Standard Serial Number (ISSN)
0734-2101
Electronic International Standard Serial Number (EISSN)
1520-8559
Other
journal abbreviation
J VAC SCI TECHNOL A