Numerical ellipsometry: AI for real-time, in situ process control for absorbing films growing on unknown transparent substrates Article

Urban III, FK, Barton, D. (2024). Numerical ellipsometry: AI for real-time, in situ process control for absorbing films growing on unknown transparent substrates . Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 42(5), 10.1116/6.0003817

cited authors

  • Urban III, FK; Barton, D

sustainable development goals

authors

publication date

  • September 1, 2024

published in

keywords

  • ARTIFICIAL-INTELLIGENCE
  • Materials Science
  • Materials Science, Coatings & Films
  • Physical Sciences
  • Physics
  • Physics, Applied
  • Science & Technology
  • Technology

Digital Object Identifier (DOI)

volume

  • 42

issue

  • 5