STUDY OF THE IONIZED CLUSTER BEAM TECHNIQUE Article

URBAN, FK, BERNSTEIN, A. (1991). STUDY OF THE IONIZED CLUSTER BEAM TECHNIQUE . Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 9(3), 537-541. 10.1116/1.577404

keywords

  • CONDENSATION
  • EXPANSION
  • GROWTH
  • METAL
  • Materials Science
  • Materials Science, Coatings & Films
  • NUCLEATION
  • Physical Sciences
  • Physics
  • Physics, Applied
  • Science & Technology
  • Technology

Digital Object Identifier (DOI)

start page

  • 537

end page

  • 541

volume

  • 9

issue

  • 3