STUDY OF THE IONIZED CLUSTER BEAM TECHNIQUE Article

URBAN, FK, ZAHN, MJ. STUDY OF THE IONIZED CLUSTER BEAM TECHNIQUE . Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 8(3), 1453-1457. 10.1116/1.576856

cited authors

  • URBAN, FK; ZAHN, MJ

authors

published in

keywords

  • Materials Science
  • Materials Science, Coatings & Films
  • Physical Sciences
  • Physics
  • Physics, Applied
  • Science & Technology
  • Technology

Digital Object Identifier (DOI)

start page

  • 1453

end page

  • 1457

volume

  • 8

issue

  • 3