URBAN, FK, ZAHN, MJ. STUDY OF THE IONIZED CLUSTER BEAM TECHNIQUE
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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 8(3), 1453-1457. 10.1116/1.576856
URBAN, FK, ZAHN, MJ. STUDY OF THE IONIZED CLUSTER BEAM TECHNIQUE
. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 8(3), 1453-1457. 10.1116/1.576856