VIRTUAL INTERFACE METHOD FOR IN-SITU ELLIPSOMETRY OF FILMS GROWN ON UNKNOWN SUBSTRATES Conference

URBAN, FK, TABET, MF. (1993). VIRTUAL INTERFACE METHOD FOR IN-SITU ELLIPSOMETRY OF FILMS GROWN ON UNKNOWN SUBSTRATES . JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 11(4), 976-980. 10.1116/1.578578

keywords

  • Materials Science
  • Materials Science, Coatings & Films
  • Physical Sciences
  • Physics
  • Physics, Applied
  • Science & Technology
  • Technology

Location

  • CHICAGO, IL

Digital Object Identifier (DOI)

Conference

  • 39TH NATIONAL SYMP OF THE AMERICAN VACUUM SOC

publisher

  • AMER INST PHYSICS

start page

  • 976

end page

  • 980

volume

  • 11

issue

  • 4