Numerical ellipsometry: Artificial intelligence for real-time, in situ absorbing film process control Article

Urban III, FK, Barton, D. (2024). Numerical ellipsometry: Artificial intelligence for real-time, in situ absorbing film process control . JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 42(2), 10.1116/6.0003196

cited authors

  • Urban III, FK; Barton, D

sustainable development goals

authors

publication date

  • March 1, 2024

published in

keywords

  • Materials Science
  • Materials Science, Coatings & Films
  • Physical Sciences
  • Physics
  • Physics, Applied
  • Science & Technology
  • Technology

Digital Object Identifier (DOI)

publisher

  • A V S AMER INST PHYSICS

volume

  • 42

issue

  • 2