Numerical ellipsometry: Real-time solutions using mapping onto the complex index plane Article

Barton, D, Comfort, JC, Urban, FK. (1996). Numerical ellipsometry: Real-time solutions using mapping onto the complex index plane . JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 14(3), 786-790. 10.1116/1.580390

keywords

  • FILMS
  • Materials Science
  • Materials Science, Coatings & Films
  • Physical Sciences
  • Physics
  • Physics, Applied
  • Science & Technology
  • Technology

Location

  • MINNEAPOLIS, MN

Digital Object Identifier (DOI)

publisher

  • A V S AMER INST PHYSICS

start page

  • 786

end page

  • 790

volume

  • 14

issue

  • 3