Numerical ellipsometry: Applications of a new algorithm for real-time, in situ film growth monitoring Article

Urban, FK, Comfort, JC. (1996). Numerical ellipsometry: Applications of a new algorithm for real-time, in situ film growth monitoring . Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 14(4), 2331-2336. 10.1116/1.580018

Open Access

keywords

  • INSITU
  • Materials Science
  • Materials Science, Coatings & Films
  • Physical Sciences
  • Physics
  • Physics, Applied
  • Science & Technology
  • Technology

Digital Object Identifier (DOI)

start page

  • 2331

end page

  • 2336

volume

  • 14

issue

  • 4