Numerical ellipsometry: Applications of a new algorithm for real-time, in situ film growth monitoring

Numerical ellipsometry: Applications of a new algorithm for real-time, in situ film growth monitoring Article

Urban, FK, Comfort, JC. (1996). Numerical ellipsometry: Applications of a new algorithm for real-time, in situ film growth monitoring . JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 14(4), 2331-2336. 10.1116/1.580018

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cited authors

Urban, FK; Comfort, JC

sustainable development goals

SDG 03: Good Health and Well-being

authors

Urban, Frank

publication date

July 1, 1996

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https://www.webofscience.com/api/gateway?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:A1996VA96400052&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=e451fd656366bf1ec5554941920a9ccb

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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A Journal

keywords

INSITU
Materials Science
Materials Science, Coatings & Films
Physical Sciences
Physics
Physics, Applied
Science & Technology
Technology

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Numerical ellipsometry: Applications of a new algorithm for real-time, in situ film growth monitoring Article

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sustainable development goals

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