EFFECTS OF SPACE-CHARGE ON ION ENERGY IN IONIZED CLUSTER BEAM FILM DEPOSITION Conference

URBAN, FK, FENG, SW. (1992). EFFECTS OF SPACE-CHARGE ON ION ENERGY IN IONIZED CLUSTER BEAM FILM DEPOSITION . Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 10(4), 1488-1492. 10.1116/1.578271

keywords

  • Materials Science
  • Materials Science, Coatings & Films
  • Physical Sciences
  • Physics
  • Physics, Applied
  • Science & Technology
  • Technology

Digital Object Identifier (DOI)

start page

  • 1488

end page

  • 1492

volume

  • 10

issue

  • 4