EFFECTS OF SPACE-CHARGE ON ION ENERGY IN IONIZED CLUSTER BEAM FILM DEPOSITION
Conference
URBAN, FK, FENG, SW. (1992). EFFECTS OF SPACE-CHARGE ON ION ENERGY IN IONIZED CLUSTER BEAM FILM DEPOSITION
. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 10(4), 1488-1492. 10.1116/1.578271
URBAN, FK, FENG, SW. (1992). EFFECTS OF SPACE-CHARGE ON ION ENERGY IN IONIZED CLUSTER BEAM FILM DEPOSITION
. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 10(4), 1488-1492. 10.1116/1.578271