Vapor phase infiltration of aluminum oxide into benzocyclobutene-based polymer dielectrics to increase adhesion strength to thin film metal interconnects
Article
Dwarakanath, Shreya, Raj, Pulugurtha Markondeya, Kondekar, Neha et al. (2020). Vapor phase infiltration of aluminum oxide into benzocyclobutene-based polymer dielectrics to increase adhesion strength to thin film metal interconnects
. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 38(3), 10.1116/1.5141475
Dwarakanath, Shreya, Raj, Pulugurtha Markondeya, Kondekar, Neha et al. (2020). Vapor phase infiltration of aluminum oxide into benzocyclobutene-based polymer dielectrics to increase adhesion strength to thin film metal interconnects
. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 38(3), 10.1116/1.5141475