Vapor phase infiltration of aluminum oxide into benzocyclobutene-based polymer dielectrics to increase adhesion strength to thin film metal interconnects Article

Dwarakanath, Shreya, Raj, Pulugurtha Markondeya, Kondekar, Neha et al. (2020). Vapor phase infiltration of aluminum oxide into benzocyclobutene-based polymer dielectrics to increase adhesion strength to thin film metal interconnects . Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 38(3), 10.1116/1.5141475

cited authors

  • Dwarakanath, Shreya; Raj, Pulugurtha Markondeya; Kondekar, Neha; Losego, Mark D; Tummala, Rao

authors

publication date

  • May 1, 2020

published in

keywords

  • MECHANISM
  • Materials Science
  • Materials Science, Coatings & Films
  • Physical Sciences
  • Physics
  • Physics, Applied
  • Science & Technology
  • TEMPERATURE
  • Technology

Digital Object Identifier (DOI)

volume

  • 38

issue

  • 3