Numerical ellipsometry: Analysis of thin metal layers using n-k-d twisted curve methods with multiple incidence angles Conference

Urban, FK, Barton, D, Tiwald, T. (2010). Numerical ellipsometry: Analysis of thin metal layers using n-k-d twisted curve methods with multiple incidence angles . JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 28(4), 947-952. 10.1116/1.3439679

keywords

  • FILMS
  • Materials Science
  • Materials Science, Coatings & Films
  • PLANE
  • Physical Sciences
  • Physics
  • Physics, Applied
  • SPECTROSCOPIC ELLIPSOMETRY
  • Science & Technology
  • Technology

Location

  • San Jose, CA

Digital Object Identifier (DOI)

Conference

  • 56th Annual Meeting of the American-Vacuum-Society

publisher

  • A V S AMER INST PHYSICS

start page

  • 947

end page

  • 952

volume

  • 28

issue

  • 4