Numerical ellipsometry: Analysis of thin metal layers using n-k-d twisted curve methods with multiple incidence angles
Conference
Urban, FK, Barton, D, Tiwald, T. (2010). Numerical ellipsometry: Analysis of thin metal layers using n-k-d twisted curve methods with multiple incidence angles
. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 28(4), 947-952. 10.1116/1.3439679
Urban, FK, Barton, D, Tiwald, T. (2010). Numerical ellipsometry: Analysis of thin metal layers using n-k-d twisted curve methods with multiple incidence angles
. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 28(4), 947-952. 10.1116/1.3439679