DEVELOPMENT OF ARTIFICIAL NEURAL NETWORKS FOR IN-SITU ELLIPSOMETRY OF FILMS GROWING ON UNKNOWN SUBSTRATES Conference

URBAN, FK, TABET, MF. (1994). DEVELOPMENT OF ARTIFICIAL NEURAL NETWORKS FOR IN-SITU ELLIPSOMETRY OF FILMS GROWING ON UNKNOWN SUBSTRATES . JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 12(4), 1952-1956. 10.1116/1.578988

keywords

  • Materials Science
  • Materials Science, Coatings & Films
  • Physical Sciences
  • Physics
  • Physics, Applied
  • Science & Technology
  • Technology

Digital Object Identifier (DOI)

publisher

  • AMER INST PHYSICS

start page

  • 1952

end page

  • 1956

volume

  • 12

issue

  • 4