Numerical ellipsometry: Advanced methods for design, testing, and use of artificial intelligence for absorbing films using Jones and/or Mueller measurements Article

Urban III, FK, Barton, D. (2025). Numerical ellipsometry: Advanced methods for design, testing, and use of artificial intelligence for absorbing films using Jones and/or Mueller measurements . JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 43(6), 10.1116/6.0004875

cited authors

  • Urban III, FK; Barton, D

authors

publication date

  • December 1, 2025

published in

keywords

  • IN-SITU ELLIPSOMETRY
  • Materials Science
  • Materials Science, Coatings & Films
  • Physical Sciences
  • Physics
  • Physics, Applied
  • REAL-TIME
  • Science & Technology
  • Technology

Digital Object Identifier (DOI)

publisher

  • A V S AMER INST PHYSICS

volume

  • 43

issue

  • 6