Journal of Microelectromechanical Systems

Edit Your Profile

Journal of Microelectromechanical Systems Journal

publication venue for

New On-Chip Nanomechanical Testing Laboratory - Applications to Aluminum and Polysilicon Thin Films. 18:555-569. 2009
Cryogenic pull-down voltage of microelectromechanical switches. 17:351-355. 2008
Fabrication of integrated vertical mirror surfaces and transparent window for packaging MEMS devices. 16:122-129. 2007
Skin-effect self-heating in air-suspended RF MEMS transmission-line structures. 15:1622-1631. 2006
Three-dimensional self-assembled sensors in thin-film SOI technology. 15:1687-1697. 2006
Effect of nanoscale heating on electrical transport in RF MEMS switch contacts. 14:935-946. 2005
A novel method for the fabrication of high-aspect ratio C-MEMS structures. 14:348-358. 2005
Prototype feedback-controlled bidirectional actuation system for MEMS applications. 9:245-251. 2000

International Standard Serial Number (ISSN)

1057-7157

Electronic International Standard Serial Number (EISSN)

1941-0158