JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

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JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Journal

publication venue for

Cryogenic pull-down voltage of microelectromechanical switches. 17:351-355. 2008
Fabrication of integrated vertical mirror surfaces and transparent window for packaging MEMS devices. 16:122-129. 2007
Skin-effect self-heating in air-suspended RF MEMS transmission-line structures. 15:1622-1631. 2006
Effect of nanoscale heating on electrical transport in RF MEMS switch contacts. 14:935-946. 2005
A novel method for the fabrication of high-aspect ratio C-MEMS structures. 14:348-358. 2005
Wafer-level mechanical characterization of silicon nitride MEMS. 14:359-367. 2005
Prototype feedback-controlled bidirectional actuation system for MEMS applications. 9:245-251. 2000

category

ENGINEERING, ELECTRICAL & ELECTRONIC Category
INSTRUMENTS & INSTRUMENTATION Category
NANOSCIENCE & NANOTECHNOLOGY Category
PHYSICS, APPLIED Category

International Standard Serial Number (ISSN)

1057-7157

journal abbreviation

J MICROELECTROMECH S