Effect of nanoscale heating on electrical transport in RF MEMS switch contacts Article

Jensen, BD, Chow, LLW, Huang, KW et al. (2005). Effect of nanoscale heating on electrical transport in RF MEMS switch contacts . JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 14(5), 935-946. 10.1109/JMEMS.2005.856653

Open Access

cited authors

  • Jensen, BD; Chow, LLW; Huang, KW; Saitou, K; Volakis, JL; Kurabayashi, K

authors

publication date

  • October 1, 2005

published in

keywords

  • (MEMS)
  • CONDUCTION
  • Engineering
  • Engineering, Electrical & Electronic
  • FILMS
  • FORCE
  • Instruments & Instrumentation
  • LIFETIME
  • Nanoscience & Nanotechnology
  • Physical Sciences
  • Physics
  • Physics, Applied
  • RESISTANCE
  • SOLIDS
  • Science & Technology
  • Science & Technology - Other Topics
  • Technology
  • electrical contacts
  • microelectromechanical systems
  • switches

Digital Object Identifier (DOI)

publisher

  • IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC

start page

  • 935

end page

  • 946

volume

  • 14

issue

  • 5