Prototype feedback-controlled bidirectional actuation system for MEMS applications Article

Bhansali, S, Zhang, AL, Zmood, RB et al. (2000). Prototype feedback-controlled bidirectional actuation system for MEMS applications . Journal of Microelectromechanical Systems, 9(2), 245-251. 10.1109/84.846705

International Collaboration

cited authors

  • Bhansali, S; Zhang, AL; Zmood, RB; Jones, PE; Sood, DK

authors

publication date

  • June 1, 2000

published in

keywords

  • Engineering
  • Engineering, Electrical & Electronic
  • Instruments & Instrumentation
  • Nanoscience & Nanotechnology
  • Physical Sciences
  • Physics
  • Physics, Applied
  • Science & Technology
  • Science & Technology - Other Topics
  • Technology
  • beam mass structure
  • bidirectional actuation and control
  • electroplating
  • etching
  • feedback control
  • inductive sensor
  • magnetic actuator
  • magnetic microsuspension system
  • micromagnetic bearing
  • position sensor

Digital Object Identifier (DOI)

start page

  • 245

end page

  • 251

volume

  • 9

issue

  • 2