Cryogenic pull-down voltage of microelectromechanical switches Article

Noel, Julien G, Bogozi, Albert, Vlasov, Yuriy A et al. (2008). Cryogenic pull-down voltage of microelectromechanical switches . JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 17(2), 351-355. 10.1109/JMEMS.2008.918404

keywords

  • DESIGN
  • Engineering
  • Engineering, Electrical & Electronic
  • FABRICATION
  • Instruments & Instrumentation
  • MEM SHUNT SWITCH
  • Nanoscience & Nanotechnology
  • Physical Sciences
  • Physics
  • Physics, Applied
  • RESONATOR
  • Science & Technology
  • Science & Technology - Other Topics
  • Technology
  • cryogenic temperature
  • microelectromechanical (MEM) devices
  • microwave switches
  • pull-down voltage
  • radio frequency (RF) devices

Digital Object Identifier (DOI)

publisher

  • IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC

start page

  • 351

end page

  • 355

volume

  • 17

issue

  • 2