Agarwal, Rahul, Samson, Scott, Kedia, Sunny
et al. (2007). Fabrication of integrated vertical mirror surfaces and transparent window for packaging MEMS devices
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JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 16(1), 122-129. 10.1109/JMEMS.2006.886010
Agarwal, Rahul, Samson, Scott, Kedia, Sunny et al. (2007). Fabrication of integrated vertical mirror surfaces and transparent window for packaging MEMS devices
. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 16(1), 122-129. 10.1109/JMEMS.2006.886010