Fabrication of integrated vertical mirror surfaces and transparent window for packaging MEMS devices Article

Agarwal, Rahul, Samson, Scott, Kedia, Sunny et al. (2007). Fabrication of integrated vertical mirror surfaces and transparent window for packaging MEMS devices . JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 16(1), 122-129. 10.1109/JMEMS.2006.886010

keywords

  • Engineering
  • Engineering, Electrical & Electronic
  • Instruments & Instrumentation
  • Nanoscience & Nanotechnology
  • Physical Sciences
  • Physics
  • Physics, Applied
  • SILICON
  • Science & Technology
  • Science & Technology - Other Topics
  • Technology
  • corner cube retroreflector (CCR)
  • microelectromechanical systems (MEMS) packaging
  • microoptoelectromechanical systems (MOEMS)
  • vertical deep reaction ion etching (DRIE)
  • vertical mirrors

Digital Object Identifier (DOI)

publisher

  • IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC

start page

  • 122

end page

  • 129

volume

  • 16

issue

  • 1