Skin-effect self-heating in air-suspended RF MEMS transmission-line structures Article

Chow, Linda LW, Wang, Zhongde, Jensen, Brian D et al. (2006). Skin-effect self-heating in air-suspended RF MEMS transmission-line structures . JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 15(6), 1622-1631. 10.1109/JMEMS.2006.883581

Open Access

cited authors

  • Chow, Linda LW; Wang, Zhongde; Jensen, Brian D; Saitou, Kazuhiro; Volakis, John L; Kurabayashi, Katsuo

authors

publication date

  • December 1, 2006

webpage

published in

keywords

  • DEVICES
  • Engineering
  • Engineering, Electrical & Electronic
  • IMPEDANCE TUNERS
  • Instruments & Instrumentation
  • Nanoscience & Nanotechnology
  • PERFORMANCE
  • Physical Sciences
  • Physics
  • Physics, Applied
  • RESISTIVITY
  • SUBMILLIMETER
  • SWITCH
  • Science & Technology
  • Science & Technology - Other Topics
  • Technology
  • coplanar waveguides (CPWs)
  • failure analysis
  • microelectromechanical devices
  • skin effect
  • transmission lines

Location

  • Long Beach, CA

Digital Object Identifier (DOI)

publisher

  • IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC

start page

  • 1622

end page

  • 1631

volume

  • 15

issue

  • 6