A novel method for the fabrication of high-aspect ratio C-MEMS structures
Article
Wang, CL, Jia, GY, Taherabadi, LH et al. (2005). A novel method for the fabrication of high-aspect ratio C-MEMS structures
. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 14(2), 348-358. 10.1109/JMEMS.2004.839312
Wang, CL, Jia, GY, Taherabadi, LH et al. (2005). A novel method for the fabrication of high-aspect ratio C-MEMS structures
. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 14(2), 348-358. 10.1109/JMEMS.2004.839312