Three-dimensional self-assembled sensors in thin-film SOI technology Article

Iker, Francois, Andre, Nicolas, Pardoen, Thomas et al. (2006). Three-dimensional self-assembled sensors in thin-film SOI technology . JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 15(6), 1687-1697. 10.1109/JMEMS.2006.886002

cited authors

  • Iker, Francois; Andre, Nicolas; Pardoen, Thomas; Raskin, Jean-Pierre

authors

publication date

  • December 1, 2006

published in

keywords

  • Engineering
  • Engineering, Electrical & Electronic
  • FABRICATION
  • Instruments & Instrumentation
  • Nanoscience & Nanotechnology
  • Physical Sciences
  • Physics
  • Physics, Applied
  • Science & Technology
  • Science & Technology - Other Topics
  • Technology
  • micromachining
  • microsensors

Digital Object Identifier (DOI)

publisher

  • IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC

start page

  • 1687

end page

  • 1697

volume

  • 15

issue

  • 6