Journal of Micromechanics and Microengineering

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Journal of Micromechanics and Microengineering Journal

publication venue for

Development of a through wafer 3D vertical micro-coaxial probe. 23. 2013
Fabrication of carbon nanostructures using photo-nanoimprint lithography and pyrolysis. 22. 2012
Sharpening of hollow silicon microneedles to reduce skin penetration force. 20. 2010
Fabrication of vertical mirrors using plasma etch and KOH: IPA polishing. 17:26-35. 2007
Numerical modeling of three-dimensional compressible gas flow in microchannnels. 16:292-302. 2006
Full-wave electromagnetic and thermal modeling for the prediction of heat-dissipation-induced RF-MEMS switch failure. 16:157-164. 2006
A low-temperature bonding technique using spin-on fluorocarbon polymers to assemble microsystems. 12:187-191. 2002

International Standard Serial Number (ISSN)

0960-1317

Electronic International Standard Serial Number (EISSN)

1361-6439