Fabrication of vertical mirrors using plasma etch and KOH : IPA polishing Article

Agarwal, R, Samson, S, Bhansali, S. (2007). Fabrication of vertical mirrors using plasma etch and KOH : IPA polishing . JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 17(1), 26-35. 10.1088/0960-1317/17/1/004

keywords

  • Engineering
  • Engineering, Electrical & Electronic
  • Instruments & Instrumentation
  • LITHOGRAPHY
  • Nanoscience & Nanotechnology
  • Physical Sciences
  • Physics
  • Physics, Applied
  • ROUGHNESS
  • SCALE
  • SILICON
  • Science & Technology
  • Science & Technology - Other Topics
  • Technology

Digital Object Identifier (DOI)

publisher

  • IOP PUBLISHING LTD

start page

  • 26

end page

  • 35

volume

  • 17

issue

  • 1