Development of a through wafer 3D vertical micro-coaxial probe Article

Boone, Justin, Krishnan, Subramanian, Bhansali, Shekhar. (2013). Development of a through wafer 3D vertical micro-coaxial probe . Journal of Micromechanics and Microengineering, 23(7), 10.1088/0960-1317/23/7/075029

keywords

  • Engineering
  • Engineering, Electrical & Electronic
  • INTERCONNECTION
  • Instruments & Instrumentation
  • Nanoscience & Nanotechnology
  • Physical Sciences
  • Physics
  • Physics, Applied
  • Science & Technology
  • Science & Technology - Other Topics
  • Technology

Digital Object Identifier (DOI)

volume

  • 23

issue

  • 7