Fabrication of carbon nanostructures using photo-nanoimprint lithography and pyrolysis Article

Penmatsa, Varun, Kawarada, Hiroshi, Wang, Chunlei. (2012). Fabrication of carbon nanostructures using photo-nanoimprint lithography and pyrolysis . JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 22(4), 10.1088/0960-1317/22/4/045024

International Collaboration

keywords

  • C-MEMS
  • ELECTROCHEMICAL APPLICATIONS
  • ELECTRODES
  • Engineering
  • Engineering, Electrical & Electronic
  • IMPRINT LITHOGRAPHY
  • Instruments & Instrumentation
  • MICROELECTROMECHANICAL SYSTEMS
  • MICROSTRUCTURES
  • NANOFLUIDIC CHANNELS
  • NANOTUBES
  • Nanoscience & Nanotechnology
  • POLYMERS
  • Physical Sciences
  • Physics
  • Physics, Applied
  • QUANTIZED MAGNETIC DISKS
  • Science & Technology
  • Science & Technology - Other Topics
  • Technology

Digital Object Identifier (DOI)

publisher

  • IOP PUBLISHING LTD

volume

  • 22

issue

  • 4