JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B Journal

publication venue for

Impact of in situ SiNx layer grown with metal organic vapor phase epitaxy on the electrical and optical properties of AlN/GaN metal insulator semiconductor field effect transistor structures. 27:2079-2083. 2009
Nonstoichiometric growth and cluster formation in low temperature grown GaAsSb for terahertz-applications. 24:1556-1558. 2006
Individual free-standing carbon nanofibers addressable on the 50 nm scale. 21:1004-1007. 2003
Two-dimensional spatial-phase-locked electron-beam lithography via sparse sampling. 18:3268-3271. 2000
Nanophase films deposited from a high-rate, nanoparticle beam 2002
STUDY OF ZINC THIN-FILMS FORMED USING LARGE CLUSTERS IN THE IONIZED CLUSTER BEAM DEPOSITION TECHNIQUE 1993

category

ENGINEERING, ELECTRICAL & ELECTRONIC Category
NANOSCIENCE & NANOTECHNOLOGY Category
PHYSICS, APPLIED Category

International Standard Serial Number (ISSN)

1071-1023

journal abbreviation

J VAC SCI TECHNOL B