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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Journal
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Overview
publication venue for
Impact of in situ SiN
x
layer grown with metal organic vapor phase epitaxy on the electrical and optical properties of AlN/GaN metal insulator semiconductor field effect transistor structures
. 27:2079-2083.
2009
Nonstoichiometric growth and cluster formation in low temperature grown GaAsSb for terahertz-applications
. 24:1556-1558.
2006
Individual free-standing carbon nanofibers addressable on the 50 nm scale
. 21:1004-1007.
2003
Two-dimensional spatial-phase-locked electron-beam lithography via sparse sampling
. 18:3268-3271.
2000
Nanophase films deposited from a high-rate, nanoparticle beam
2002
STUDY OF ZINC THIN-FILMS FORMED USING LARGE CLUSTERS IN THE IONIZED CLUSTER BEAM DEPOSITION TECHNIQUE
1993
Research
category
ENGINEERING, ELECTRICAL & ELECTRONIC
Category
NANOSCIENCE & NANOTECHNOLOGY
Category
PHYSICS, APPLIED
Category
Identifiers
International Standard Serial Number (ISSN)
1071-1023
Other
journal abbreviation
J VAC SCI TECHNOL B