Impact of in situ SiNx layer grown with metal organic vapor phase epitaxy on the electrical and optical properties of AlN/GaN metal insulator semiconductor field effect transistor structures
Article
Cho, E, Seo, S, Jin, C et al. (2009). Impact of in situ SiNx layer grown with metal organic vapor phase epitaxy on the electrical and optical properties of AlN/GaN metal insulator semiconductor field effect transistor structures
. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 27(5), 2079-2083. 10.1116/1.3186615
Cho, E, Seo, S, Jin, C et al. (2009). Impact of in situ SiNx layer grown with metal organic vapor phase epitaxy on the electrical and optical properties of AlN/GaN metal insulator semiconductor field effect transistor structures
. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 27(5), 2079-2083. 10.1116/1.3186615