On-chip micro-power: Three dimensional structures for micro-batteries and micro-supercapacitors Conference

Beidaghi, Majid, Wang, Chunlei. (2010). On-chip micro-power: Three dimensional structures for micro-batteries and micro-supercapacitors . Proceedings of SPIE - The International Society for Optical Engineering, 7679 10.1117/12.852254

cited authors

  • Beidaghi, Majid; Wang, Chunlei

sustainable development goals

date/time interval

  • April 5, 2010 -

publication date

  • January 1, 2010

published in

keywords

  • FABRICATION
  • FILMS
  • LITHIUM-ION BATTERIES
  • MEMS
  • MICROBATTERY
  • Nanoscience & Nanotechnology
  • On-chip micro-power
  • Optics
  • Physical Sciences
  • Remote Sensing
  • Science & Technology
  • Science & Technology - Other Topics
  • Technology
  • micro-battery
  • micro-supercapacitor
  • three dimensional (3D) structures

Digital Object Identifier (DOI)

volume

  • 7679