Numerical ellipsometry: Artificial intelligence based real-time, in situ process control for absorbing films depositing on virtual substrates including multiple unknown layers Article

Urban, FK, Barreto, A. (2026). Numerical ellipsometry: Artificial intelligence based real-time, in situ process control for absorbing films depositing on virtual substrates including multiple unknown layers . JOURNAL OF APPLIED PHYSICS, 140(16), 10.1063/5.0339706

cited authors

  • Urban, FK; Barreto, A

authors

publication date

  • October 28, 2026

published in

keywords

  • Physical Sciences
  • Physics
  • Physics, Applied
  • Science & Technology

Digital Object Identifier (DOI)

publisher

  • AIP Publishing

volume

  • 140

issue

  • 16