Numerical ellipsometry: Advancements in artificial intelligence methods to obtain accuracy, speed, and ease of use for a wider range of thin film optical properties Article

Urban III, FK, Barreto, A. (2026). Numerical ellipsometry: Advancements in artificial intelligence methods to obtain accuracy, speed, and ease of use for a wider range of thin film optical properties . JOURNAL OF APPLIED PHYSICS, 139(9), 10.1063/5.0313169

cited authors

  • Urban III, FK; Barreto, A

authors

publication date

  • March 7, 2026

published in

keywords

  • IN-SITU ELLIPSOMETRY
  • Physical Sciences
  • Physics
  • Physics, Applied
  • REAL-TIME
  • Science & Technology

Digital Object Identifier (DOI)

publisher

  • AIP Publishing

volume

  • 139

issue

  • 9