Ultra Low Power 3-D Flow Meter in Monolithic SOI Technology Conference

Andre, N, Rue, B, Scheen, G et al. (2011). Ultra Low Power 3-D Flow Meter in Monolithic SOI Technology . SENSORS, ACTUATORS, AND MICROSYSTEMS GENERAL SESSION, 35(5), 319-324. 10.1149/1.3570812

cited authors

  • Andre, N; Rue, B; Scheen, G; Francis, LA; Flandre, D; Raskin, J-P

authors

date/time interval

  • May 1, 2011 -

publication date

  • January 1, 2011

published in

keywords

  • Electrochemistry
  • Engineering
  • Engineering, Electrical & Electronic
  • MEMS
  • Physical Sciences
  • Physics
  • Physics, Applied
  • SENSORS
  • Science & Technology
  • Technology

Location

  • CANADA, Montreal

Digital Object Identifier (DOI)

Conference

  • 15th International Symposium on Advanced Semiconductor-On-Insulator Technology and Related Physics/219th Meeting of the Electrochemical-Society/Symposium on Electrodeposition for Energy Applications 2

publisher

  • ELECTROCHEMICAL SOCIETY INC

start page

  • 319

end page

  • 324

volume

  • 35

issue

  • 5