Reliable characteristics and stabilization of on-membrane SOI MOSFET-based components heated up to 335 °C Article

Amor, S, Andre, N, Gerard, P et al. (2017). Reliable characteristics and stabilization of on-membrane SOI MOSFET-based components heated up to 335 °C . 32(1), 10.1088/1361-6641/32/1/014001

International Collaboration

cited authors

  • Amor, S; Andre, N; Gerard, P; Ali, SZ; Udrea, F; Tounsi, F; Mezghani, B; Francis, LA; Flandre, D

authors

publication date

  • January 1, 2017

keywords

  • Engineering
  • Engineering, Electrical & Electronic
  • MEMS
  • MOSFET
  • Materials Science
  • Materials Science, Multidisciplinary
  • Physical Sciences
  • Physics
  • Physics, Condensed Matter
  • SENSOR SYSTEM
  • Science & Technology
  • Silicon-on-Insulator
  • TEMPERATURE
  • Technology
  • annealing
  • diode
  • micro-hotplate

Digital Object Identifier (DOI)

publisher

  • IOP PUBLISHING LTD

volume

  • 32

issue

  • 1