Effect of Silicon Substrate Resistivity on Large-Area High-Voltage Spiral Inductor Performance Conference

Zeidi, Najeh, Rack, Martin, Andre, Nicolas et al. (2023). Effect of Silicon Substrate Resistivity on Large-Area High-Voltage Spiral Inductor Performance . 2023 SYMPOSIUM ON DESIGN, TEST, INTEGRATION & PACKAGING OF MEMS/MOEMS, DTIP, 10.1109/DTIP58682.2023.10267935

Open Access International Collaboration

cited authors

  • Zeidi, Najeh; Rack, Martin; Andre, Nicolas; Raskin, Jean-Pierre; Tounsi, Fares; Flandre, Denis

authors

date/time interval

  • May 28, 2023 -

publication date

  • January 1, 2023

published in

keywords

  • MEMS suspended inductor
  • Materials Science
  • Materials Science, Characterization & Testing
  • Science & Technology
  • Technology
  • high resistivity silicon substrate
  • high voltage
  • planar spiral inductor
  • trap-rich

Digital Object Identifier (DOI)