InGaAs/InP thermoelectric infrared sensor utilizing surface bulk micromachining technology Article

Dehe, A, Pavlidis, D, Hong, K et al. (1997). InGaAs/InP thermoelectric infrared sensor utilizing surface bulk micromachining technology . IEEE TRANSACTIONS ON ELECTRON DEVICES, 44(7), 1052-1059. 10.1109/16.595931

cited authors

  • Dehe, A; Pavlidis, D; Hong, K; Hartnagel, HL

authors

publication date

  • July 1, 1997

published in

keywords

  • 40 Engineering
  • 4009 Electronics, Sensors and Digital Hardware
  • 4016 Materials Engineering

Digital Object Identifier (DOI)

publisher

  • Institute of Electrical and Electronics Engineers (IEEE)

start page

  • 1052

end page

  • 1059

volume

  • 44

issue

  • 7