Real time x-ray studies of semiconductor device structures Conference

Clarke, R, Passos, WD, Chan, YJ et al. (1991). Real time x-ray studies of semiconductor device structures . Proceedings of SPIE - The International Society for Optical Engineering, 1361(pt 1), 2-12. 10.1117/12.47673

cited authors

  • Clarke, R; Passos, WD; Chan, YJ; Pavlidis, D; Lowe, W; Rodricks, B; Brizard, C

authors

publication date

  • January 1, 1991

published in

Digital Object Identifier (DOI)

start page

  • 2

end page

  • 12

volume

  • 1361

issue

  • pt 1