InAlAs/InGaAs varactor diodes with THz cutoff frequencies fabricated by planar integrated technology Conference

Marsh, P, Ng, GI, Pavlidis, D et al. (1994). InAlAs/InGaAs varactor diodes with THz cutoff frequencies fabricated by planar integrated technology . 595-598.

cited authors

  • Marsh, P; Ng, GI; Pavlidis, D; Hong, K

authors

abstract

  • Reported here is the planar integrated technology which utilizes InP-based materials and plated Au airbridges to contact the anode. By avoiding the use of a bridge-supporting dielectric, this airbridge technology reduces parasitics.

publication date

  • January 1, 1994

start page

  • 595

end page

  • 598