Fabrication and characterization of novel silicon-compatible high-density capacitors Article

Sharma, Himani, Sethi, Kanika, Raj, P Markondeya et al. (2012). Fabrication and characterization of novel silicon-compatible high-density capacitors . Journal of Materials Science: Materials in Electronics, 23(2), 528-535. 10.1007/s10854-011-0431-9

cited authors

  • Sharma, Himani; Sethi, Kanika; Raj, P Markondeya; Tummala, Rao

authors

publication date

  • February 1, 2012

published in

keywords

  • ALUMINUM
  • ARRAYS
  • ATOMIC LAYER DEPOSITION
  • ELECTRICAL-PROPERTIES
  • Engineering
  • Engineering, Electrical & Electronic
  • Materials Science
  • Materials Science, Multidisciplinary
  • Physical Sciences
  • Physics
  • Physics, Applied
  • Physics, Condensed Matter
  • SI(100)
  • Science & Technology
  • THIN-FILMS
  • Technology
  • WATER-VAPOR

Digital Object Identifier (DOI)

start page

  • 528

end page

  • 535

volume

  • 23

issue

  • 2