Numerical Ellipsometry: Ellipsometer analysis in the n-k plane for growing films on unknown homogeneous, isotropic substrates and unknown, layered substrates Article

Urban, FK, Barton, D. (2008). Numerical Ellipsometry: Ellipsometer analysis in the n-k plane for growing films on unknown homogeneous, isotropic substrates and unknown, layered substrates . THIN SOLID FILMS, 517(3), 1081-1085. 10.1016/j.tsf.2008.04.101

keywords

  • Ellipsometry
  • Film growth
  • Materials Science
  • Materials Science, Coatings & Films
  • Materials Science, Multidisciplinary
  • Optical property
  • Physical Sciences
  • Physics
  • Physics, Applied
  • Physics, Condensed Matter
  • REAL-TIME
  • Science & Technology
  • Technology
  • Thin film

Digital Object Identifier (DOI)

publisher

  • ELSEVIER SCIENCE SA

start page

  • 1081

end page

  • 1085

volume

  • 517

issue

  • 3