Ellipsometer measurements using focused and masked beams Article

Barton, D, Urban, FK. (2006). Ellipsometer measurements using focused and masked beams . Thin Solid Films, 515(3), 911-916. 10.1016/j.tsf.2006.07.060

keywords

  • ANGLE SPECTROSCOPIC ELLIPSOMETRY
  • Materials Science
  • Materials Science, Coatings & Films
  • Materials Science, Multidisciplinary
  • Physical Sciences
  • Physics
  • Physics, Applied
  • Physics, Condensed Matter
  • Science & Technology
  • Technology
  • ellipsometry
  • nanoparticle
  • thin films

Digital Object Identifier (DOI)

start page

  • 911

end page

  • 916

volume

  • 515

issue

  • 3