Numerical ellipsometry: Analysis of thin metal layers using n-k plane methods with multiple incidence angles Article

Urban, FK, Barton, D, Tiwald, T. (2009). Numerical ellipsometry: Analysis of thin metal layers using n-k plane methods with multiple incidence angles . Thin Solid Films, 518(5), 1411-1414. 10.1016/j.tsf.2009.09.071

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keywords

  • Absorbing film
  • Ellipsometry
  • FILMS
  • Materials Science
  • Materials Science, Coatings & Films
  • Materials Science, Multidisciplinary
  • Metal film
  • Physical Sciences
  • Physics
  • Physics, Applied
  • Physics, Condensed Matter
  • Science & Technology
  • Technology
  • Thin film

Digital Object Identifier (DOI)

start page

  • 1411

end page

  • 1414

volume

  • 518

issue

  • 5