Nanophase films deposited from a high-rate, nanoparticle beam Conference

Urban, FK, Hosseini-Tehrani, A, Griffiths, P et al. (2002). Nanophase films deposited from a high-rate, nanoparticle beam . JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 20(3), 995-999. 10.1116/1.1481749

keywords

  • CLUSTER BEAMS
  • COPPER
  • ENERGY
  • Engineering
  • Engineering, Electrical & Electronic
  • LASER-ABLATION
  • Nanoscience & Nanotechnology
  • OPTICAL-PROPERTIES
  • Physical Sciences
  • Physics
  • Physics, Applied
  • SUPERLATTICES
  • Science & Technology
  • Science & Technology - Other Topics
  • THIN-FILMS
  • Technology

Digital Object Identifier (DOI)

publisher

  • A V S AMER INST PHYSICS

start page

  • 995

end page

  • 999

volume

  • 20

issue

  • 3