REAL-TIME, IN-SITU ELLIPSOMETRY SOLUTIONS USING ARTIFICIAL NEURAL-NETWORK PREPROCESSING Article

URBAN, FK, TABET, MF. (1994). REAL-TIME, IN-SITU ELLIPSOMETRY SOLUTIONS USING ARTIFICIAL NEURAL-NETWORK PREPROCESSING . THIN SOLID FILMS, 245(1-2), 167-173. 10.1016/0040-6090(94)90894-X

keywords

  • DATA REDUCTION
  • Materials Science
  • Materials Science, Coatings & Films
  • Materials Science, Multidisciplinary
  • Physical Sciences
  • Physics
  • Physics, Applied
  • Physics, Condensed Matter
  • Science & Technology
  • Technology

Digital Object Identifier (DOI)

publisher

  • ELSEVIER SCIENCE SA LAUSANNE

start page

  • 167

end page

  • 173

volume

  • 245

issue

  • 1-2