Extremely fast ellipsometry solutions using cascaded neural networks alone Article

Urban, FK, Barton, D, Boudani, NI. (1998). Extremely fast ellipsometry solutions using cascaded neural networks alone . THIN SOLID FILMS, 332(1-2), 50-55. 10.1016/S0040-6090(98)01201-2

keywords

  • Materials Science
  • Materials Science, Coatings & Films
  • Materials Science, Multidisciplinary
  • Physical Sciences
  • Physics
  • Physics, Applied
  • Physics, Condensed Matter
  • Science & Technology
  • Technology
  • artificial neural network
  • ellipsometry
  • in situ sensor
  • real-time growth control
  • thin film

Location

  • SAN DIEGO, CALIFORNIA

Digital Object Identifier (DOI)

publisher

  • ELSEVIER SCIENCE SA

start page

  • 50

end page

  • 55

volume

  • 332

issue

  • 1-2