NUMERICAL ELLIPSOMETRY - ENHANCEMENT OF NEW ALGORITHMS FOR REAL-TIME, IN-SITU FILM GROWTH MONITORING Article

URBAN, FK, COMFORT, JC. (1994). NUMERICAL ELLIPSOMETRY - ENHANCEMENT OF NEW ALGORITHMS FOR REAL-TIME, IN-SITU FILM GROWTH MONITORING . THIN SOLID FILMS, 253(1-2), 262-268. 10.1016/0040-6090(94)90332-8

keywords

  • COATINGS
  • ELLIPSOMETRY
  • INSITU
  • Materials Science
  • Materials Science, Coatings & Films
  • Materials Science, Multidisciplinary
  • NICKEL
  • OPTICAL PROPERTIES
  • Physical Sciences
  • Physics
  • Physics, Applied
  • Physics, Condensed Matter
  • Science & Technology
  • Technology

Digital Object Identifier (DOI)

publisher

  • ELSEVIER SCIENCE SA LAUSANNE

start page

  • 262

end page

  • 268

volume

  • 253

issue

  • 1-2