NUMERICAL ELLIPSOMETRY - ENHANCEMENT OF NEW ALGORITHMS FOR REAL-TIME, IN-SITU FILM GROWTH MONITORING Article

URBAN, FK, COMFORT, JC. (1994). NUMERICAL ELLIPSOMETRY - ENHANCEMENT OF NEW ALGORITHMS FOR REAL-TIME, IN-SITU FILM GROWTH MONITORING . Thin Solid Films, 253(1-2), 262-268. 10.1016/0040-6090(94)90332-8

cited authors

  • URBAN, FK; COMFORT, JC

sustainable development goals

authors

publication date

  • December 15, 1994

published in

keywords

  • COATINGS
  • ELLIPSOMETRY
  • INSITU
  • Materials Science
  • Materials Science, Coatings & Films
  • Materials Science, Multidisciplinary
  • NICKEL
  • OPTICAL PROPERTIES
  • Physical Sciences
  • Physics
  • Physics, Applied
  • Physics, Condensed Matter
  • Science & Technology
  • Technology

Digital Object Identifier (DOI)

start page

  • 262

end page

  • 268

volume

  • 253

issue

  • 1-2