Sensitivity of variable angle spectroscopic ellipsometry to isotropic thin film properties Article

Urban, FK, Barton, D. (1997). Sensitivity of variable angle spectroscopic ellipsometry to isotropic thin film properties . THIN SOLID FILMS, 308 31-37. 10.1016/S0040-6090(97)00670-6

keywords

  • Materials Science
  • Materials Science, Coatings & Films
  • Materials Science, Multidisciplinary
  • Physical Sciences
  • Physics
  • Physics, Applied
  • Physics, Condensed Matter
  • Science & Technology
  • Technology
  • ellipsometry
  • optical measurement
  • optical properties
  • thin films

Location

  • SAN DIEGO, CA

Digital Object Identifier (DOI)

publisher

  • ELSEVIER SCIENCE SA

start page

  • 31

end page

  • 37

volume

  • 308