Recent developments in ionized cluster beam thin film deposition Article

Cox, AJ, Nainaparampil, JJ, Tabet, MF et al. (1995). Recent developments in ionized cluster beam thin film deposition . Thin Solid Films, 270(1-2), 637-642. 10.1016/0040-6090(95)06845-7

keywords

  • Materials Science
  • Materials Science, Coatings & Films
  • Materials Science, Multidisciplinary
  • Physical Sciences
  • Physics
  • Physics, Applied
  • Physics, Condensed Matter
  • SIZE
  • Science & Technology
  • Technology
  • clusters
  • deposition process
  • zinc

Digital Object Identifier (DOI)

start page

  • 637

end page

  • 642

volume

  • 270

issue

  • 1-2