Toward a priori selection of ellipsometry angles and wavelengths using a high performance semantic database Article

Urban, FK, Barton, D. (1998). Toward a priori selection of ellipsometry angles and wavelengths using a high performance semantic database . THIN SOLID FILMS, 313 119-123. 10.1016/S0040-6090(97)00783-9

keywords

  • Materials Science
  • Materials Science, Coatings & Films
  • Materials Science, Multidisciplinary
  • Physical Sciences
  • Physics
  • Physics, Applied
  • Physics, Condensed Matter
  • Science & Technology
  • Technology
  • condition
  • ellipsometry angles
  • high performance semantic database
  • resolution
  • wavelengths

Location

  • CHARLESTON, SOUTH CAROLINA

Digital Object Identifier (DOI)

publisher

  • ELSEVIER SCIENCE SA

start page

  • 119

end page

  • 123

volume

  • 313