MODELING OF SURFACE-ROUGHNESS IN VARIABLE-ANGLE SPECTROSCOPIC ELLIPSOMETRY, USING NUMERICAL PROCESSING OF ATOMIC-FORCE MICROSCOPY IMAGES Article

URBAN, FK, ATHEY, PR, ISLAM, MS. (1994). MODELING OF SURFACE-ROUGHNESS IN VARIABLE-ANGLE SPECTROSCOPIC ELLIPSOMETRY, USING NUMERICAL PROCESSING OF ATOMIC-FORCE MICROSCOPY IMAGES . THIN SOLID FILMS, 253(1-2), 326-332. 10.1016/0040-6090(94)90342-5

keywords

  • ATOMIC FORCE MICROSCOPY
  • COATINGS
  • ELLIPSOMETRY
  • EVAPORATION
  • GLASS
  • Materials Science
  • Materials Science, Coatings & Films
  • Materials Science, Multidisciplinary
  • OPTICAL-PROPERTIES
  • PHYSICAL-PROPERTIES
  • Physical Sciences
  • Physics
  • Physics, Applied
  • Physics, Condensed Matter
  • Science & Technology
  • TIN OXIDE-FILMS
  • Technology

Digital Object Identifier (DOI)

publisher

  • ELSEVIER SCIENCE SA

start page

  • 326

end page

  • 332

volume

  • 253

issue

  • 1-2