An algorithm for analyzing ellipsometric data taken with multiple angles of incidence Article

Comfort, JC, Urban, FK, Barton, D. (1996). An algorithm for analyzing ellipsometric data taken with multiple angles of incidence . THIN SOLID FILMS, 290 51-56. 10.1016/S0040-6090(96)09186-9

keywords

  • Materials Science
  • Materials Science, Coatings & Films
  • Materials Science, Multidisciplinary
  • Physical Sciences
  • Physics
  • Physics, Applied
  • Physics, Condensed Matter
  • Science & Technology
  • Technology
  • ellipsometry

Location

  • SAN DIEGO, CA

Digital Object Identifier (DOI)

publisher

  • ELSEVIER SCIENCE SA

start page

  • 51

end page

  • 56

volume

  • 290