Comparison of three methods for ellipsometry characterization of thin absorbing films Article

Barton, D, Urban, FK. (2017). Comparison of three methods for ellipsometry characterization of thin absorbing films . THIN SOLID FILMS, 644 182-189. 10.1016/j.tsf.2017.06.060

keywords

  • Ellipsometry
  • Materials Science
  • Materials Science, Coatings & Films
  • Materials Science, Multidisciplinary
  • OPTICAL-CONSTANTS
  • Optical measurements
  • Optical properties
  • Physical Sciences
  • Physics
  • Physics, Applied
  • Physics, Condensed Matter
  • SILICON
  • Science & Technology
  • Technology
  • Thin films

Location

  • San Diego, CA

Digital Object Identifier (DOI)

publisher

  • ELSEVIER SCIENCE SA

start page

  • 182

end page

  • 189

volume

  • 644